[Highly-functional Material Week TOKYO 2021] Line scan film thickness meter - Otsuka Electronics Co., Ltd.

I will explain the line scan film thickness meter.
Otsuka Electronics has been asked to measure a large number of film thicknesses, but

Until now, many customers were dissatisfied with the fact that it was 1 point.

After all, I was able to measure a film thickness meter that can measure the measurement points on the entire surface.
Not only the thickness, but also other film abnormalities are here.

It is in the form of being able to judge.

Basically, there are film thickness range, time, and system, so

I hope that you can just ask for the details. that’s all.